Contact for high-k metal gate device

ABSTRACT

An integrated circuit having an improved gate contact and a method of making the circuit are provided. In an exemplary embodiment, the method includes receiving a substrate. The substrate includes a gate stack disposed on the substrate and an interlayer dielectric disposed on the gate stack. The interlayer dielectric is first etched to expose a portion of the gate electrode, and then the exposed portion of the gate electrode is etched to form a cavity. The cavity is shaped such that a portion of the gate electrode overhangs the electrode. A conductive material is deposited within the cavity and in electrical contact with the gate electrode. In some such embodiments, the etching of the gate electrode forms a curvilinear surface of the gate electrode that defines the cavity.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a continuation application of U.S.application Ser. No. 15/180,847 filed on Jun. 13, 2016, now U.S. Pat.No. 9,711,605, issued Jun. 13, 2016, which is a divisional applicationof U.S. application Ser. No. 14/507,064 filed on Oct. 6, 2014, now U.S.Pat. No. 9,368,603, issued Oct. 6, 2014, which is a continuation-in-partof U.S. Ser. No. 13/971,267 filed on Aug. 20, 2013, entitled “CONTACTFOR HIGH-K METAL GATE DEVICE”, now U.S. Pat. No. 8,853,753, issued Aug.20, 2013, which is a divisional of U.S. Ser. No. 13/289,112 filed onNov. 4, 2011, now U.S. Pat. No. 8,546,227, issued Oct. 1, 2013, entitled“CONTACT FOR HIGH-K METAL GATE DEVICE,” which claims the benefit of U.S.Ser. No. 61/535,140 filed Sep. 15, 2011, the entire disclosure of eachof which is incorporated herein by reference in its entirety.

BACKGROUND

There are several continuing areas of development and improvement forsemiconductor device fabrication. One such area is device size. Thesize, including width, of a gate structure in metal-oxide-semiconductorfield-effect transistor (MOSFET) devices continues to shrink, providingbenefits such as increased density and reduced power. Another area isthe use of MOSFET devices having a high dielectric constant (high-k)material and a metal gate.

Yet another avenue of inquiry is the development of three-dimensionaldesigns, such as a fin-like field effect transistor (FinFET). A FinFETcan be thought of as a typical planar device extruded out of a substrateand into the gate. A typical FinFET is fabricated on a thin “fin” (orfin structure) extending upwards from the body from the substrate, andmay be formed by depositing fin material on the substrate, etchingnon-fin areas of the substrate, or a combination thereof. The channel ofthe FET is formed in this vertical fin, and a gate is provided over(e.g., wrapping) the fin. Wrapping the gate around the fin increases thecontact area between the channel region and the gate and allows the gateto control the channel from both sides. This may result in highercurrent flow, a reduction in short channel effect, and other advantages.The present disclosure provides improvements that relate to thefabrication of planar devices as well as FinFETs and other non-planardevices.

SUMMARY

The present disclosure provides many different embodiments of methodsfor making integrated circuit devices. In one embodiment, a method ofmaking an integrated circuit includes providing a substrate and forminga metal structure over the substrate. A dielectric is formed over themetal structure and a first etch process creates a trench in thedielectric over the metal structure. A second, isotropic etch processforms an undercut in the metal structure, the undercut being proximateto the trench. The trench and undercut are filled with a conductivematerial, such as tungsten, to contact the metal structure.

In another embodiment, a method for making an integrated circuitincludes providing a substrate with a high-k dielectric and providing apolysilicon gate structure over the high-k dielectric. A doping processis performed on the substrate adjacent to the polysilicon gatestructure, after which the polysilicon gate structure is removed andreplaced with a metal gate structure. An interlayer dielectric (ILD) isdeposited over the metal gate structure and the doped substrate, and adry etch process forms a trench in the ILD to a top surface of the metalgate structure. After the dry etch process, a wet etch process forms anundercut near the top surface of the metal gate structure. The trenchand undercut are then filled with a metal material.

The present disclosure also provides an integrated circuit. In oneembodiment, the integrated circuit includes a semiconductor substratehaving source and drain regions. A gate dielectric is provided over thesemiconductor substrate, and a metal gate structure is provided over thesemiconductor substrate and the gate dielectric and between the sourceand drain regions. An interlayer dielectric (ILD) is provided over thesemiconductor substrate. The integrated circuit further includes firstand second contacts extending through the ILD and adjacent the sourceand drain regions, respectively; and a third contact extending throughthe ILD and adjacent a top surface of the metal gate structure. Thethird contact extends into an undercut region of the metal gatestructure.

In some embodiments, the method includes receiving a circuit elementthat includes a gate stack disposed on a semiconductor substrate and aninterlayer dielectric disposed on the gate stack. In turn, the gatestack includes a gate electrode. The interlayer dielectric is etched toexpose a portion of the gate electrode, and the gate electrode is etchedto form a cavity shaped such that a portion of the gate electrodeoverhangs the cavity. A conductive material is deposited within thecavity and in electrical contact with the gate electrode. In one suchembodiment, the etching of the gate electrode is configured to form acurvilinear surface of the gate electrode that defines the cavity. Inanother such embodiment, the gate stack further includes a work functionlayer disposed adjacent to the gate electrode, and the etching of thegate electrode is configured to expose a portion of the work functionlayer without etching the work function layer.

In some embodiments, the method includes receiving a substrate that hasa gate stack disposed thereupon and an interlayer material disposed onand around the gate stack. The gate stack includes a dielectric layerdisposed on the substrate; and a gate electrode disposed on thedielectric layer. An etching technique is performed on the interlayermaterial to expose a portion of the gate electrode, and an isotropicetch of the gate electrode is performed to form a recess having amaximum width located in an interior portion of the gate electrode. Aconductive material is deposited within the recess and within an etchedportion of the interlayer material to form a gate contact. In one suchembodiment, the isotropic etch of the gate electrode is configured toform the recess having a curvilinear profile.

In yet further embodiments, the integrated circuit includes a devicegate disposed on a substrate. In turn, the device gate includes aninterfacial layer disposed on the substrate, a dielectric materialdisposed on the interfacial layer, and a gate electrode disposed on thedielectric material. The integrated circuit also includes a contactextending into and conductively coupled to the gate electrode. Thecontact is shaped such that a portion of the gate electrode is disposedon the contact opposite the substrate. In one such embodiment, thecontact is further shaped such that the gate electrode and the contacthave a curvilinear interface. In another such embodiment, the integratedcircuit further includes an adhesion structure disposed between thecontact and the gate electrode.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isemphasized that, in accordance with the standard practice in theindustry, various features are not drawn to scale. In fact, thedimensions of the various features may be arbitrarily increased orreduced for clarity of discussion. Also, several elements and featuresare shown in the figures, not all of which are numbered for the sake ofclarity. It is understood, however, that symmetrical features and itemswill be similarly situated.

FIG. 1 is a flowchart of a method of making the semiconductor devicehaving a metal gate stack according to one embodiment of the presentinvention.

FIGS. 2-19 are sectional views of one embodiment of a semiconductordevice having an n-type and p-type MOSFET (an NFET and PFET) with metalgate stacks, at various fabrication stages constructed according to themethod of FIG. 1.

FIG. 20 is a flowchart of a method of fabricating a semiconductor deviceaccording to various embodiments of the present invention.

FIGS. 21-27B are cross-sectional views of a semiconductor deviceundergoing the fabrication method of FIG. 20 according to variousembodiments of the present invention.

FIG. 28 is a flowchart of a method of fabricating a semiconductor devicethat includes one or more fin-based devices according to variousembodiments of the present invention.

FIG. 29 is a perspective view of the semiconductor device including thefin-based device according to various embodiments of the presentinvention.

FIGS. 30-34 are cross-sectional views of the semiconductor deviceundergoing the method of FIG. 28 according to various embodiments of thepresent invention.

FIGS. 35-39 are cross-sectional views of the semiconductor deviceundergoing the method of FIG. 28 to form an alternate contactconfiguration according to various embodiments of the present invention.

DETAILED DESCRIPTION

It is to be understood that the following disclosure provides manydifferent embodiments, or examples, for implementing different featuresof various embodiments. Specific examples of components and arrangementsare described below to simplify the present disclosure. These are, ofcourse, merely examples and are not intended to be limiting. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.Moreover, the formation of a first feature over or on a second featurein the description that follows may include embodiments in which thefirst and second features are formed in direct contact, and may alsoinclude embodiments in which additional features may be formedinterposing the first and second features, such that the first andsecond features may not be in direct contact.

FIG. 1 is a flowchart of a method 100 for making a semiconductor deviceaccording to one embodiment. The semiconductor device includes an n-typefield-effect transistor (NFET) and a p-type field-effect transistor(PFET), both with a metal gate stack constructed according to variousaspects of the present disclosure. FIGS. 2 through 19 are sectionalviews of a semiconductor structure 200 at various fabrication stages andconstructed according to one or more embodiments. The semiconductorstructure 200 and the method 100 of making the same are collectivelydescribed with reference to FIGS. 1 through 19.

Referring to FIGS. 1 and 2, the method 100 begins at step 102 byproviding a semiconductor substrate 201 on which to form a polysilicongate. The substrate 201 may be any suitable workpiece upon whichfeatures may be formed, and an exemplary substrate 201 is a bulk siliconsubstrate. Alternatively, the substrate 201 may comprise an elementary(single element) semiconductor, such as silicon or germanium in acrystalline structure; a compound semiconductor, such as silicongermanium, silicon carbide, gallium arsenic, gallium phosphide, indiumphosphide, indium arsenide, and/or indium antimonide; anon-semiconductor material, such as soda-lime glass, fused silica, fusedquartz, calcium fluoride (CaF₂); and/or combinations thereof. Possiblesubstrates 201 also include a silicon-on-insulator (SOI) substrate andother layered substrates 201. In the illustrated embodiment, thesemiconductor substrate 201 includes silicon. Alternatively, thesubstrate includes germanium, silicon germanium or other propersemiconductor materials. The semiconductor substrate also includesvarious doped regions such as n-well and p-wells.

The semiconductor substrate 201 includes an isolation feature such asshallow trench isolation (STI) 202 formed in the substrate to separateNFET and PFET transistors. The formation of the STI feature includesetching a trench in a substrate and filling the trench by one or moreinsulator materials such as silicon oxide, silicon nitride, or siliconoxynitride. The filled trench may have a multi-layer structure such as athermal oxide liner layer with silicon nitride filling the trench. Inone embodiment, the STI feature 202 is created using a process sequencesuch as: growing a pad oxide, forming a low pressure chemical vapordeposition (LPCVD) nitride layer, patterning an STI opening usingphotoresist and masking, etching a trench in the substrate, optionallygrowing a thermal oxide trench liner to improve the trench interface,filling the trench with CVD oxide, using chemical mechanicalplanarization (CMP) to etch back, and using nitride stripping to leavethe STI structure. The semiconductor substrate 201 also includes variousn-wells and p-wells formed in various active regions.

Two similar polysilicon gate stacks 204, 206 are formed on the substrate201, on either side of the STI structure 202. In the present embodiment,each polysilicon gate stack 204, 206 includes (viewed in the figure fromthe substrate 201 up), a silicon oxide interfacial layer (IL), a high-kdielectric layer (HK) and a cap layer, generally designated with thereference number 214. In various embodiments, the interfacial layer maybe formed by chemical oxide technique, thermal oxide procedure, atomiclayer deposition (ALD) or chemical vapor deposition (CVD). The high kdielectric material layer may be formed by CVD, ALD, plasma enhanced CVD(PE CVD), or plasma enhanced ALD (PEALD). The cap layer can be formedusing CVD with precursor silane (SiH₄) or other silicon based precursor.

Continuing with the present embodiment, a polycrystalline silicon(polysilicon) layer 216 is formed above the IL/HK/Cap layer 214. In thepresent embodiment, the polysilicon layer 216 is non-doped. The siliconlayer 216 alternatively or additionally may include amorphous silicon.An oxide 218 is formed over the polysilicon layer 216, and a siliconnitride layer (SiN) 218 is formed over it, forming a hard mask (HM). Itis understood that the formation, including patterning, of such layersis well known in the art, and will not be further discussed for the sakeof brevity and clarity.

Referring to FIGS. 1 and 3, the method 100 proceeds to step 103, where adielectric seal 230 is formed around the gate stacks 204, 206. In thepresent embodiment, the dielectric seal 230 is formed using atomic layerdeposition to form a layer of SiN and/or other suitable dielectricmaterial of approximately 50 A thickness. In addition, the substrate 201is doped to form halogen and light doped drain (LDD) regions for thesource and drain (S/D) features. The source and drain regions are formedfor the NFET and the PFET devices using proper doping species.

Referring to FIGS. 1 and 4, the method 100 proceeds to step 104, where amain side wall (MSW) is formed. The MSW includes a first sidewall layer232 adjacent to the outer surface of the dielectric seal 230 and theupper surface of the substrate 201. In the present embodiment, the firstsidewall layer 232 is formed by using ALD to form silicon oxide and/orother suitable dielectric to a thickness of about 30 A. The MSW alsoincludes a second sidewall layer 234 formed on an outer surface of thefirst sidewall layer 232. In the illustrated embodiment, the secondsidewall layer 235 includes SiN and/or other suitable dielectric formedto a maximum thickness of about 250 A. As shown in FIG. 4, the MSW isadjacent to the sidewalls of the polysilicon gate stacks 204, 206, anddo not cover the entire substrate.

Referring to FIGS. 1 and 5, the method 100 proceeds to step 105, whereS/D and electrostatic discharge regions 240 are fully implanted andactivated. As mentioned above with respect to step 103, LDD regions werepreviously provided in the substrate 201 prior to the MSW being formedat step 104. At step 105, a deeper implantation process is performed.The doped regions for the NFET are doped with P-type dopants, such asboron or BF₂, and the doped regions for the PFET are doped with N-typedopants, such as phosphorus or arsenic. The doped regions 240 may beformed directly on the substrate 201, in a P-well structure, in anN-well structure, in a dual-well structure, or using a raised structure.In the present embodiment, the S/D activation is performed by a laseranneal (LSA) at about 1150 C, along with a rapid thermal anneal (RTA)with about a 1010 C spike.

Referring to FIGS. 1 and 6, the method 100 proceeds to step 106, inwhich nickel silicide (NiSi) regions 242 are formed for future contactsto the S/D regions 240. In the present embodiment, Ni is deposited to athickness of about 400 A in the substrate 201, guided by the MSW formedat step 105.

Referring to FIGS. 1 and 7, the method 100 proceeds to step 107, inwhich a portion of the second sidewall layer 234 of the MSWs is removedfrom the two gate stacks. As shown in FIG. 7, a portion of the secondsidewall layer 234, now labeled 244, remains on the MSWs, as well as thefirst sidewall layer 232. In an embodiment, this removal process isperformed by a wet etch using H₃PO₄ at about 120 C. In addition, the HM218, 220 may be removed from the top portion of the polysilicon gate216. In one such embodiment, the SiN of the second sidewall layer 234and the semiconductor oxide of the HM 218, 220 are removed by a dry etchprocess.

Referring to FIGS. 1 and 8, the method 100 proceeds to step 108, inwhich an interlayer dielectric (ILD) layer 250 is formed over the twogate stacks 204, 206. The ILD layer 250 may include a semiconductoroxide, a semiconductor nitride, a semiconductor oxynitride, TEOS oxide,phosphosilicate glass (PSG), borophosphosilicate glass (BPSG),fluorinated silica glass (FSG), carbon doped silicon oxide, BlackDiamond® (Applied Materials of Santa Clara, Calif.), Xerogel, Aerogel,amorphous fluorinated carbon, Parylene, BCB (bis-benzocyclobutenes),SiLK (Dow Chemical, Midland, Mich.), polyimide, other suitablematerials, and/or combinations thereof. In the present embodiment, atensile SiN contact etch stop layer 252 is deposited first, to athickness of about 200 A. Thereafter, the ILD layer 250, phosphatesilicate glass (PSG) in the present embodiment, is deposited to athickness of about 2000 A using an ion plasma (IPM).

Referring to FIGS. 1 and 9, the method 100 proceeds to step 109, inwhich the upper surface of the device is planarized to expose thepolysilicon gates 216. In the present embodiment, a chemical mechanicalpolishing process is performed.

Referring to FIGS. 1 and 10, the method 100 proceeds to step 110, inwhich one of the two polysilicon gate stacks 204, 206 is masked. In thepresent embodiment, the polysilicon mask 216 for the NFET gate stack 204is masked with a patterned photoresist (PR) layer 260. Specifically, a20 A TiN hard mask 262 is deposited over a top surface of the device,and then the PR layer 260 is deposited over it. The PR layer 260 ispatterned to mask the NFET gate stack 204.

Referring to FIGS. 1 and 11, the method 100 proceeds to step 111, thepolysilicon 216 in the PFET gate stack 206 is removed. In the presentembodiment, the polysilicon 216 is removed via etching from the PFETgate stack 206 (which is now more accurately described as a trench thana gate stack), while the polysilicon in the NFET gate stack remainsintact for being shielded by the patterned PR 260 in FIG. 10.Afterwards, a metal gate 266 is formed in the trench remaining from theremoved polysilicon 216 in the PFET gate stack 206. The metal gate canbe formed of one or more layers 267, and in the present embodiment,include the following deposited metals in order: TaN, TiN, TaN, TiN andAl (with trace amounts of Cu). The deposited metal layers 267 cover theentire surface of the device 200, but are then removed, including the PR260, by a CMP process.

Referring to FIGS. 1, 12, and 13, the method 100 proceeds to step 112,in which a similar process is repeated on the NFET gate stack 204. Inthe present embodiment, since the polysilicon has already been removedand replaced on the PFET gate stack 206, a patterned PR layer coveringthe PFET gate stack is not used. The polysilicon 216 is removed from theNFET gate stack 204, such as by an etch process. Afterwards, a metalgate 268 is formed in the trench remaining from the removed polysilicon216 in the NFET gate stack 204. The metal gate 268 can be formed of oneor more layers 269, and in the present embodiment, include the followingdeposited metals in order: TaN, TiAl, TiN and Al (with trace amounts ofCu). The deposited metal layers 269 cover the entire surface of thedevice 200, but are then removed, including the PR 260, by a CMPprocess. As a result, both of the polysilicon gate stacks are now metalgate stacks 204, 206.

In the present embodiment, a film 286, 288 is formed over the metal gatestacks 204, 206. The film 286, 288 may include a conductive materialsuch as a metal, metal oxide, metal nitride, metal oxynitride, compoundsthereof, and/or other suitable materials. With specific reference toFIG. 13, in one embodiment, the film 286, 288 is an ultra-thin metaloxynitride film with a thickness of about 1 nm to about 10 nm is formedover the two gate stacks 266, 268, as disclosed in U.S. Ser. No.61/530,845, which is hereby incorporated by reference. In otherembodiments, the film operates as an etch stop layer for a subsequentetch process, discussed below with reference to FIG. 16.

Referring to FIGS. 1 and 14, the method 100 proceeds to step 114, inwhich an ILD layer 290 is formed over the metal gate stacks 204, 206,including the ultra-thin metal oxynitride films 288, 286. ILD layer 290may have a similar composition to ILD layer 250 or may include differentmaterials and/or different arrangements. For example, the ILD layer 290may include a semiconductor oxide, a semiconductor nitride, asemiconductor oxynitride, TEOS oxide, PSG, BPSG, FSG, carbon dopedsilicon oxide, Black Diamond®, Xerogel, Aerogel, amorphous fluorinatedcarbon, Parylene, BCB, SILK, polyimide, other suitable materials, and/orcombinations thereof. In the present embodiment, the ILD layer 290 isundoped silicate glass (USG) at a thickness of about 1450 Angstroms. TheUSG of the ILD 290 is formed by a deposition process at 400 C usingSiH4/N2O/He. The ILD 290 can be formed on top of the ILD 250, or the ILDlayer 250 can be removed, and/or an additional combinations ofdielectric materials can be formed.

Referring to FIGS. 1 and 15, the method 100 proceeds to step 115, wherea layer of photoresist (PR) 292 is applied to the top surface of the ILDlayer 290. The PR 292 is patterned, such as by a photolithography ore-beam process, to form openings that correspond with trenches andcontacts to be discussed further below.

Referring to FIGS. 1 and 16, the method 100 proceeds to step 116 inwhich a first etch 294 is performed on the ILD layer 290 according tothe patterned PR 292. The first etching process 294 may utilize adirectional, or anisotropic, etching technique configured to etchvertically through the ILD layer 290 with minimal lateral etching. Thisproduces vertical openings in the ILD layer 290 for subsequent contactformation. While an anisotropic etching technique is shown, the firstetching process 294 may include any suitable anisotropic or isotropicetching technique including dry etching, wet etching, reactive ionetching RIE, and combinations thereof. Furthermore, the first etchingprocess 294 may use any suitable etch chemistry or combination thereof.In such embodiments, the etchants and other etching parameters may betuned so that the exposed material of the ILD layer 290 is removedwithout etching other materials such as the materials of the gate stacks266 and 268 including metal layers 267, 269. For example, in the presentembodiment, a dry, anisotropic plasma etch equipped withfluorine-containing gases, such as CF₄, CH₂F₂, or C₄F₆, is used. Inorder to achieve a proper etch profile and selectivity, the anisotropicplasma etch 294 may include multiple etch portions, such as a main etch,an over etch and a post etch treatment. In the illustrated embodiment,the dry etch 294 creates trenches 296, 298 with relatively verticalprofiles that stop at the top surface of the gate stack 266, 268 and thesubstrate 201. In some embodiments, one or more etch-stop layers mayhave been previously applied to the substrate 201 to stop or slow-downthe etch process.

Referring to FIGS. 1 and 17, the method 100 proceeds to step 117 inwhich a second etch 300 is performed. The second etching process 300 mayutilize a non-directional, or isotropic, etching technique configured tocreate a cavity including an undercut portion 302 in a layer of the gatestacks 266, 268, such as the metal layers 267, 269. In the illustratedembodiment, the undercut portion 302 has a substantially symmetricalcurvilinear surface 299 and has its largest horizontal width (asmeasured parallel to the surface of the substrate 201) in an interiorportion of the metal layers 267, 269 of the gate stacks 266, 268. Thiscreates an overhang of the metal layers 267,269 above the undercutportion 302, which provides increased contact area between the metallayers 267, 269 and a subsequently formed contact. The increased surfacearea may reduce resistivity at the contact interface and may alsoprovide a more secure electrical connection. In addition to forming theundercut portion 302, the second etching process may also interact withthe trenches 296, 298 to form a more tapered profile (see, e.g., FIG.19).

While an isotropic etching technique is shown, the second etchingprocess 300 may include any suitable anisotropic or isotropic etchingtechnique including dry etching, wet etching, reactive ion etching RIE,and combinations thereof. Furthermore, the second etching process 300may use any suitable etch chemistry or combination thereof. In suchembodiments, the etchants and other etching parameters may be tuned sothat certain materials of the gate stacks 266, 268 (such as the metallayers 267, 269) are etched without etching other materials such as thedielectric seal 230. For example, in the present embodiment, a wet,isotropic etch selective to the materials of the metal gate stacks 266,268 is used. In the embodiment above with reference to TaN, TiAl, TiNand Al, the etchant includes a solution such as diluted APM(NH₄OH/H₂O₂/H₂O) solution in room temperature. In some embodiments, thepatterned PR 292 is also removed before, during, or after the secondetching process 300.

Referring to FIGS. 1 and 18, the method 100 proceeds to step 118 where aglue layer 304 (also referred to as an adhesion layer) is applied to thetrenches 298, as well as the curvilinear surface 299 of the undercutportion 302. As the name implies, the glue layer 304 may be used toimprove the quality of the interface between the metal layers 267, 269and the conductor of the contact. Accordingly, the glue layer 304 mayinclude one or more layers of conductive materials including metals(e.g., W, Al, Ta, Ti, Ni, Cu, Co, etc.) and metal nitrides, which may bedeposited via ALD, CVD, PE CVD, PEALD, physical vapor deposition (PVD),and/or other suitable deposition process. In the present embodiment, theglue layer 304 includes multiple deposited layers of Ti and TiN. Inother embodiments, one or more additional layers can be added, such asbarrier layers.

Referring to FIGS. 1 and 19, the method 100 proceeds to step 119 inwhich the trenches 296, 298 are filled with a contact fill material 307.The contact fill material 307 may include one or more layers of anysuitable conductive materials including metals (e.g., W, Al, Ta, Ti, Ni,Cu, etc.), metal oxides, metal nitrides, and/or combinations thereof.For example, the contact fill material 307 may contain a barrier layerthat includes W, Ti, TiN, Ru, or combinations thereof and aCu-containing fill material disposed on the barrier layer. In anotherembodiment, the contact material 307 includes tungsten, which isdeposited over the device 200 with or without a barrier layer. Yetanother embodiment includes a cobalt contact material 307. The contactfill material 307 may be deposited by any suitable technique includingPVD (e.g., sputtering), CVD, PE CVD, ALD, PEALD, and/or combinationsthereof. A planarization process can be performed to remove portions ofthe contact material that is above the ILD layer 290, resulting in S/Dcontacts 306 and gate contacts 308.

The present embodiments discussed above provides many benefits, it beingunderstood that other embodiments may not have the same benefits. Thebenefits of the embodiments discussed above include increased surfacecontact between the gate contact 308 and the corresponding metal gatestacks 266, 268. By having increased surface contact, it has been foundthat the contact resistance there between is reduced.

The technique of the present disclosure is also suitable for use withother gate stack configurations. For example, FIGS. 20-27B illustrateanother example of the semiconductor device 2100 undergoing the methodof forming undercut contacts. FIG. 20 is a flowchart of a method 2000 offabricating the semiconductor device 2100 according to aspects of thepresent disclosure. It is understood that additional steps can beprovided before, during, and after the method 2000 and that some of thesteps described can be replaced or eliminated for other embodiments ofthe method. FIGS. 21-27B are cross-sectional views of a semiconductordevice 2100 undergoing the fabrication method 2000 according to variousaspects of the present disclosure. FIGS. 21-27B have been simplified forthe sake of clarity and to better illustrate the concepts of the presentdisclosure.

Referring to FIG. 21 and to block 2002 of FIG. 20, a semiconductordevice 2100 is received. In many aspects, the semiconductor device 2100is substantially similar to the semiconductor structure 200 of FIGS.2-19. For example, the semiconductor device 2100 may include a substrate201, one or more isolation features 202, source/drain (S/D) regions 240,an interfacial layer 2102, a dielectric seal 230, a first sidewall layer232, a second sidewall layer 234, and an ILD layer 250 eachsubstantially similar to those of FIGS. 2-19. However, in contrast tothe previous embodiments, the gate dielectric layer 2204 and/or the workfunction layer 2206 is formed after the sacrificial polysilicon gate 216is removed rather than before.

Referring to FIG. 21, removing the polysilicon gate 216 leaves a recessdefined by one or more of the dielectric seal 230, the sidewall layers232 and 234, and/or the ILD layer 250. The removal of the polysilicongate layer 216 may be performed using the technique of steps 110-112 ofmethod 100 or by any other suitable replacement gate technique. Thereplacement gate stack 2202 is formed in the recess as shown in FIG. 22.

Referring to block 2004 of FIG. 20 and to FIG. 22, a gate dielectriclayer 2204 is formed on the interfacial layer 2102 in the recess. In theillustrated embodiment, the gate dielectric layer 2204 also extendsalong the vertical surfaces of the dielectric seal 230 such that theportions of the gate dielectric layer 2204 on the vertical surfacesextend above the portions of the gate dielectric layer 2204 formed onthe interfacial layer 2102. This forms a U-shaped structure. In someembodiments, a highly-conformal deposition technique such as CVD or ALDis used to deposit the gate dielectric layer 2204 in the U-shapedconfiguration, although non-conformal deposition techniques may also beused. In these embodiments and others, suitable deposition processesinclude CVD, high-density plasma CVD (HDP-CVD), ALD, PVD, spin-ondeposition, and/or other suitable deposition processes. Suitablematerials for the gate dielectric layer 2204 are commonly characterizedby their dielectric constant relative to silicon oxide. The gatedielectric layer 2204 may be substantially similar to the high-kdielectric layer (HK) of FIGS. 2-19 and may include a high-k dielectricmaterial such as HfO₂, HfSiO, HfSiON, HfTaO, HfTiO, HfZrO, zirconiumoxide, aluminum oxide, hafnium dioxide-alumina (HfO₂—Al₂O₃) alloy, othersuitable high-k dielectric materials, and/or combinations thereof.Additionally or in the alternative, the gate dielectric layer 2204 mayinclude other dielectrics such as silicon dioxide, silicon nitride,silicon oxynitride, silicon carbide, amorphous carbon,tetraethylorthosilicate (TEOS), other suitable dielectric material,and/or combinations thereof.

Referring to block 2006 of FIG. 20 and to FIG. 22, one or more workfunction layers 2206 may be formed on the gate dielectric layer 2204 inthe recess. The work function layers 2206 may be limited to thebottommost portion of the gate dielectric layer 2204. Alternately, suchas in the illustrated embodiment, the work function layer 2206 alsoextends along the vertical surfaces of the gate dielectric layer 2204 toform a U-shaped structure within the U-shaped structure of the gatedielectric layer 2204. Suitable work function metal gate materialsinclude n-type and/or p-type work function materials based on the typeof device to which the gate stack corresponds. Exemplary p-type workfunction metals include TiN, TaN, Ru, Mo, Al, WN, ZrSi₂, MoSi₂, TaSi₂,NiSi₂, WN, other suitable p-type work function materials, and/orcombinations thereof. Exemplary n-type work function metals include Ti,Ag, TaAl, TaAlC, TiAlN, TaC, TaCN, TaSiN, Mn, Zr, other suitable n-typework function materials, and/or combinations thereof. In variousembodiments, the work function layers 2206 are deposited by CVD, ALD,PVD, and/or other suitable processes.

Referring to block 2008 of FIG. 20 and to FIG. 22, a gate electrodelayer 2208 is formed on the gate dielectric layer 2204 and the workfunction layer 2206 (if present). The gate electrode layer 2208 mayinclude any suitable conductive material including polysilicon, Al, Cu,Ti, Ta, W, Mo, TaN, NiSi₂, cobalt silicide, TiN, WN, TiAl, TiAlN, TaCN,TaC, TaSiN, metal alloys, other suitable materials, and/or combinationsthereof. In the illustrated embodiments, the gate electrode layer 2208is different in composition from the work function layer 2206. Forexample, an Al or Cu-containing gate electrode layer 2208 may be usedwith a Ti-containing work function layer 2206. The difference incomposition may be used to selectively etch the gate electrode layer2208 without etching the work function layer 2206 as described in moredetail below. The gate electrode layer 2208 may be deposited by CVD,ALD, PVD (e.g., sputtering), and/or other suitable processes. A CMPprocess may follow the deposition of the gate electrode layer 2208 toplanarize the top surface of the gate electrode layer 2208 and to removeany electrode material extending outside of the recess.

Referring to block 2010 of FIG. 20 and to FIG. 22, an optional hard masklayer 2210 may be formed on the gate electrode layer 2208 to insulatethe gate electrode layer 2208 and to protect it during subsequentprocessing. The hard mask layer 2210 may also function as an etch stoplayer. Accordingly, the hard mask layer 2210 may include one or morelayers of any suitable dielectric such as a semiconductor oxide, asemiconductor nitride, a semiconductor oxynitride, and/or asemiconductor carbide. In one such embodiments, the hard mask layer 2210includes SiN. Additionally or in the alternative, the hard mask layer2210 may include one or more layers of a conductive materialsubstantially similar to that of films 286 and 288 of FIGS. 2-19.Suitable conductive materials include metal, metal oxide, metal nitride,metal oxynitride, compounds thereof, and/or other suitable materials. Inan embodiment, the hard mask layer 2210 includes a layer of a conductivematerial adjacent to the gate electrode layer 2208 and a layer of adielectric material opposite the layer of conductive material. The hardmask layer 2210 may be deposited by any suitable deposition techniqueincluding CVD, ALD, PVD, and/or other suitable processes. In oneexample, the deposition includes a controlled etching of the gateelectrode layer 2208 that creates a recess in the gate stack 2202 inwhich the hard mask layer 2210 is deposited.

An ILD layer 290 is formed over the gate stack 2202, and may besubstantially similar to the ILD layer 290 of FIGS. 2-19. In thatregard, ILD layer 290 includes any suitable dielectric, such as asemiconductor oxide, a semiconductor nitride, a semiconductoroxynitride, TEOS oxide, phosphosilicate glass (PSG), other suitablematerials, and/or combinations thereof and may be substantially similarin composition to ILD layer 250 or may include different materialsand/or different arrangements. ILD layer 290 may exhibit an etchantsensitivity that is different from surrounding etch stop materials suchas the hard mask layer 2210. For example, silicon oxide is moresensitive to buffered hydrofluoric acid than silicon nitride, whereassilicon nitride is more sensitive to phosphoric acid than silicon oxide.The ILD layer 290 may be formed by any suitable technique includingthose described in step 114 of method 100.

Referring to block 2014 of FIG. 20 and to FIG. 23, a layer ofphotoresist 292 is applied to the top surface of the ILD layer 290 andpatterned to form openings exposing regions of the ILD layer 290 to beetched. This may be performed substantially as described in step 115 ofFIG. 1. Referring to block 2016 of FIG. 20 and to FIG. 24, a firstetching technique 294 using a first etching chemistry is performed onthe ILD layers 250 and 290 in order to etch portions of the ILD layers250 and 290 exposed by the photoresist 292. The first etching process294 may be performed substantially as described in step 116 of FIG. 1and may include any suitable anisotropic or isotropic etching techniqueincluding dry etching, wet etching, reactive ion etching RIE, andcombinations thereof. In the illustrated embodiment, the first etchingprocess 294 utilizes an anisotropic etching technique configured to etchvertically through the ILD layer 290 with minimal lateral etching. Ascan be seen, the first etching process 294 exposes the gate electrodelayer 2208 through the ILD layer 290. This may include etching throughthe hard mask layer 2210 if one is included in the gate stack 2202. Theetching of the ILD layer 290 and the hard mask layer 2210 may becontrolled by adjusting the etching technique, the etchant, and/or otheretching parameters. In the present embodiment, a dry anisotropic plasmaetch equipped with fluorine-containing gases, such as CF₄, CH₂F₂, orC₄F₆, is used. In order to achieve a proper etch profile andselectivity, the anisotropic etch 294 may include multiple etchportions, such as a main etch, an over etch and a post etch treatment.

Referring to block 2018 of FIG. 20 and to FIG. 25A, a second etchingprocess 300 is performed substantially as described in step 117 of FIG.1 in order to create a cavity in the gate electrode layer 2208. Thesecond etching process 300 may utilize a non-directional, or isotropic,etching technique configured to create the cavity so that it includes anundercut portion 302 in the gate electrode layer 2208. In theillustrated embodiment, the undercut portion 302 has a substantiallysymmetrical curvilinear surface 299 and has its largest horizontal width(as measured parallel to the surface of the substrate 201) in aninterior portion of the gate electrode layer 2208. This creates anoverhang of the gate electrode material above the undercut portion 302,which provides increased contact area between the gate electrode layer2208 and a subsequently formed contact. The increased surface area mayreduce resistivity at the contact interface and may also provide a moresecure electrical connection. In addition to forming the undercutportion 302, the second etching process may also interact with the ILDlayers 250 and 290 to taper the profile of the contact openings.

While an isotropic etching technique is shown, the second etchingprocess 300 may include any suitable anisotropic or isotropic etchingtechnique including dry etching, wet etching, reactive ion etching RIE,and combinations thereof. Likewise, the second etching process 300 mayuse any suitable etch chemistry or combination thereof, and in someembodiments, the etchants and other etching parameters are be tuned sothat the gate electrode layer 2208 is etched without etching the workfunction layer 2206 and/or the gate dielectric layer 2204. Referring toFIG. 25B, this etchant selectivity may prove especially useful when thecontact openings are misaligned, which may commonly occur alongside theembodiments of FIG. 25A. In other words, the same method 2000 mayproduce the embodiments of FIG. 25B and FIG. 25A at the same time and onthe same substrate 201. In such embodiments, the curvilinear surface 299of the resulting undercut portion 302 may be interrupted by an interfacewith the work function layer 2206 and/or the gate dielectric layer 2204,but solid electrical contact can still be maintained. In the illustratedembodiment, the second etching exposes the work function layer 2206without etching it. Accordingly, the surface 299 has a substantiallyplanar portion at the interface with the work function layer 2206, andthe undercut portion 302 does not extend into the work function layer2206. The patterned photoresist 292 may be removed before, during, orafter the second etching process 300.

Referring to block 2020 of FIG. 20 and to FIG. 26, a glue layer oradhesion layer 304 is deposited on the ILD layer 290, on the curvilinearsurface 299 of the undercut portion 302, and on the hard mask layer 2210if the gate stack 2202 so includes. The glue layer 304 may include oneor more layers of conductive materials including metals, metal alloys,other metal compounds, non-metallic conductors, and/or combinationsthereof, which may be deposited via ALD, CVD, PE CVD, PEALD, PVD, and/orother suitable deposition process substantially as described in step 118of FIG. 1. In the present embodiment, the glue layer 304 includesmultiple deposited layers of Ti and TiN.

Referring to block 2022 of FIG. 20 and to FIG. 27A the trenches arefilled with a contact fill material 307, which may be performedsubstantially as described in step 119 of FIG. 1. The deposited contactfill material 307 extends through the ILD layers 250 and 290 to formcontacts to the gate stack 2202 as well as to the source/drain (S/D)regions 240. Because of the undercut portion 302, the gate electrodelayer 2208 surrounds the contact fill material 307, and at least some ofthe gate electrode layer 2208 is disposed on top of the contact fillmaterial 307 (opposite the substrate). This increases the surface areabetween the gate electrode layer 2208 and the contact fill material 307and may improve the electrical connection therebetween.

The contact fill material 307 may include one or more layers of anysuitable conductive materials including metals, metal alloys, othermetal compounds, non-metallic conductors, and/or combinations thereof.In one such embodiment, the contact fill material 307 includes a barrierlayer that includes W, Ti, TiN, or Ru and includes a Cu-containing fillmaterial disposed on the barrier layer. In another embodiment, thecontact fill material 307 includes tungsten with or without a barrierlayer. The contact fill material 307 may be deposited by any suitabletechnique including PVD (e.g., sputtering), CVD, PE CVD, ALD, PEALD,and/or combinations thereof. Deposition may be followed by a CMP processto remove contact fill material 307 extending beyond the ILD layer 290.

By selecting an etchant for the second etching process 300 that does notetch the work function layer 2206 or the gate dielectric layer 2204,variations in device performance caused by misaligned contacts can bedramatically reduced. As can be seen in FIG. 27B, the resulting contactremains completely within the gate electrode layer 2208 even if thecontact is misaligned. While the glue layer 304 or the contact fillmaterial 307 may physically contact the work function layer 2206 or thegate dielectric layer 2204, because these layers remain intact, theperformance of the resulting device is not impacted. It is understoodthat the misaligned embodiments of FIG. 27B frequently occur on the samesubstrate 201 as the properly aligned embodiments of FIG. 27A asinter-layer alignment may not be guaranteed throughout the substrate201.

In addition to being well suited for fabricating contacts to a varietyof planar devices, the technique of the present disclosure may also beapplied to form contacts to FinFETS and other non-planar devices. Anexample of such an application is described with reference to FIGS.28-34. FIG. 28 is a flow diagram of a method 2800 for fabricating asemiconductor device 2900 that includes one or more fin-based devicesaccording to various aspects of the present disclosure. It is understoodthat additional steps can be provided before, during, and after themethod 2800 and that some of the steps described can be replaced oreliminated for other embodiments of the method. FIG. 29 is a perspectiveview of the semiconductor device 2900 undergoing the fabrication method2800 according to various aspects of the present disclosure. FIGS. 30-34are cross-sectional views of a portion of the semiconductor device 2900,where the cross-section is taken through the channel region 2906 (alongplane 2928), according to various aspect of the present disclosure.FIGS. 29-34 have been simplified for the sake of clarity and to betterillustrate the concepts of the present disclosure.

Referring to block 2802 of FIG. 28 and to FIG. 29, the semiconductordevice 2900 is received and includes a substrate 201 or wafer with oneor more fin structures 2902 formed upon it. The fin structures 2902 arerepresentative of any raised feature, and while the illustratedembodiments include FinFET fin structures 2902, further embodimentsinclude other raised active and passive devices formed upon thesubstrate 201. The illustrated fin structures 2902 each comprise a pairof opposing source/drain regions 2904, which may include various dopedsemiconductor materials, and a channel region 2906 disposed between thesource/drain regions 2904. The flow of carriers (electrons for ann-channel device and holes for a p-channel device) through the channelregion 2906 is controlled by a voltage applied to a gate stack 2908adjacent to and overwrapping the channel region 2906. One of the gatestacks 2908 is shown as translucent to better illustrate the underlyingchannel region 2906. In the illustrated embodiment, the channel region2906 rises above the plane of the substrate 201 upon which it is formed,and accordingly, the fin structure 2902 may be referred to as a“non-planar” device. The raised channel region 2906 provides a largersurface area proximate to the gate stack 2908 than comparable planardevices. This strengthens the electromagnetic field interactions betweenthe gate stack 2908 and the channel region 2906, which may reduceleakage and short channel effects associated with smaller devices. Thusin many embodiments, FinFETs and other nonplanar devices deliver betterperformance in a smaller footprint than their planar counterparts.

The elements of the semiconductor device 2900 will now be described inadditional detail. Substrate 201 may be substantially similar to thesubstrate 201 of FIGS. 2-19 and may include any suitable semiconductorand non-semiconductor material. For example, the substrate 201 mayinclude one or more layers of an elementary semiconductor, such assilicon or germanium; a compound semiconductor, such as silicongermanium, silicon carbide, gallium arsenic, gallium phosphide, indiumphosphide, indium arsenide, and/or indium antimonide; anon-semiconductor material, such as soda-lime glass, fused silica, fusedquartz, calcium fluoride (CaF₂); other suitable materials; and/orcombinations thereof.

The substrate 201 may include isolation features 2910 disposed betweenthe fin structures 2902. Similar to the isolation features 202 of FIGS.2-19, the isolation features 2910 may include a liner (not shown) and afill material 2912. The liner reduces crystalline defects at theinterface between the substrate 201 and the dielectric fill material andmay include any suitable material including a semiconductor nitride, asemiconductor oxide, a thermal semiconductor oxide, a semiconductoroxynitride, a polymer dielectric, and/or other suitable materials, andmay be formed using any suitable deposition process including thermalgrowth, ALD, CVD, HDP-CVD, PVD, and/or other suitable depositionprocesses. In some embodiments, the liner includes a conventionalthermal oxide liner formed by a thermal oxidation process. In furtherexemplary embodiments, the liner includes a semiconductor nitride formedvia HDP-CVD. The fill material 2912 is disposed on the liner within theisolation features. Suitable fill materials 2912 include semiconductoroxides, semiconductor nitrides, semiconductor oxynitrides, FSG, low-Kdielectric materials, and/or combinations thereof. In various exemplaryembodiments, the fill material 2912 is deposited using a HDP-CVDprocess, a sub-atmospheric CVD (SACVD) process, a high-aspect ratioprocess (HARP), and/or a spin-on process. In one such embodiment, a CVDprocess is used to deposit a flowable dielectric material that includesboth a dielectric fill material 2912 and a solvent in a liquid orsemiliquid state. A curing process is used to drive off the solvent,leaving behind the dielectric fill material 2912 in its solid state.

The fin structures 2902 are formed on the substrate 201 by recessingsurrounding portions of the substrate 201 and leaving the fin structures2902 and/or by depositing material to grow the fin structures 2902 onthe substrate 201. After a gate stack 2908 is formed to protect thechannel regions 2906 of the fin structures, additional semiconductormaterial may be added to the source/drain regions 2904 of the finstructure 2902. In many embodiments, the additional material isdeposited by one or more epitaxy or epitaxial (epi) processes, wherebySi features, SiGe features, and/or other suitable features are grown ina crystalline state on the fin structure 2902. Suitable epitaxyprocesses include CVD deposition techniques (e.g., vapor-phase epitaxy(VPE) and/or ultra-high vacuum CVD (UHV-CVD)), molecular beam epitaxy,and/or other suitable processes. The material of the source/drainregions 2904 may be in-situ doped during the epitaxy process byintroducing doping species including: p-type dopants, such as boron orBF₂; n-type dopants, such as phosphorus or arsenic; and/or othersuitable dopants including combinations thereof. If the source/drainregions 2904 are not in-situ doped, an implantation process (i.e., ajunction implant process) is performed to dope the regions 2904.

The gate stacks 2908 are formed on top of the fin structures 2902 andmay include an interfacial layer 2914, a gate dielectric layer 2916, agate electrode layer 2918, and an optional capping layer 2920 disposedon and overwrapping the channel region 2906 of the fin structures 2902.Each of these elements may be substantially similar to their planardevice counterparts described in FIGS. 2-19. For example, theinterfacial layer 2914 may include an oxide, HfSiO, a nitride, anoxynitride, and/or other suitable material and may be deposited by anysuitable method, such as thermal oxidation, ALD, CVD, ozone oxidation,etc. The gate dielectric layer 2916 may include any suitable dielectricsuch as a high-k dielectric material including: LaO, AlO, ZrO, TiO,Ta₂O₅, Y₂O₃, SrTiO₃ (STO), BaTiO₃ (BTO), BaZrO, HfZrO, HfLaO, HfSiO,LaSiO, AlSiO, HfTaO, HfTiO, (Ba,Sr)TiO₃ (BST), Al₂O₃, Si₃N₄, oxynitrides(SiON), and/or other suitable materials. The gate dielectric layer 2916may be deposited on the interfacial layer 2914 by any suitabletechnique, such as ALD, CVD, metal-organic CVD (MOCVD), PVD, thermaloxidation, combinations thereof, and/or other suitable techniques.

The gate electrode layer 2918 is disposed on the gate dielectric layer,and in various examples, contains polysilicon, metals, metal alloys,metal compounds, and/or non-metallic conductors. Suitable metals includeTi, Ag, Al, TiAlN, TaC, TaCN, TaSiN, Mn, Zr, TiN, TaN, Ru, Mo, Al, WN,Cu, W, and/or any suitable materials. In some embodiments, differentgate materials are used for nMOS and pMOS devices. In some embodiments,the gate electrode layer 2918 has a multilayer structure that includesone or more of a metal layer, a liner layer, a wetting layer, and/or anadhesion layer.

An optional capping layer 2920 may be formed on the gate electrode layer2918 to protect it during subsequent processing. In some embodiments,the capping layer 2920 includes a dielectric material such as asemiconductor oxide, a semiconductor nitride, a semiconductoroxynitride, and/or a semiconductor carbide. Additionally or in thealternative, the capping layer 2920 may include a conductive material toincrease the conductive surface area in contact with a subsequentlyformed contact. Suitable conductive materials include non-metallicconductors, metals, and/or metal compounds, such as metal oxides, metalnitrides, and/or other metal compounds. In various exemplaryembodiments, a conductive capping layer includes TiO and/or AlO. Thecapping layer 2920 may be formed on the gate electrode layer 2918 byCVD, PVD, ALD, and/or other suitable deposition technique.

The gate stack 2908 may also include one or more sidewall spacing layers2922 and 2924, of which two are shown. In a typical gate replacementprocess, the gate stack 2908 is first formed with a sacrificial or dummygate (typically polysilicon). The sidewall spacing layers 2922 and 2924are formed on the sacrificial gate, and then the sacrificial material isremoved. The sidewall spacing layers 2922 and 2924 remain and give shapeto the subsequently formed gate elements such as the gate electrodelayer 2918, the capping layer 2920, and, in some embodiments, the gatedielectric layer 2916 and/or the interfacial layer 2914.

Suitable materials for the sidewall spacing layers 2922 and 2924 includedielectrics such as semiconductor oxides, semiconductor nitrides,semiconductor oxynitrides, semiconductor carbides, and/or otherdielectrics. In some examples, the sidewall spacing layers 2922 and 2924include alternating layers of different dielectrics such as a firstsemiconductor oxide spacing layer 2922 and a second semiconductornitride spacing layer 2924. Any of a number of techniques may be used toform the sidewall spacing layers 2922 and 2924 including CVD, PVD, ALD,and/or other suitable deposition techniques. For example, in anembodiment, a dielectric material is deposited conformally on the gatestack 2908 and an anisotropic etch is used to remove the horizontalportions of the dielectric leaving only the vertical portions to form asidewall spacing layer. Suitable conformal deposition techniques includeCVD and HDP-CVD. Other techniques for forming the sidewall spacinglayers 2922 and 2924 are both contemplated and provided for.

The semiconductor device may also include one or more ILD layers 2926(represented as translucent in FIG. 29) formed on the substrate 201 andsurrounding the fin structures 2902 and the gate stacks 2908. The ILDlayers 2926 may be substantially similar to ILD layers 250 and 290 ofFIGS. 2-19. For example, the ILD layers 2926 may include a semiconductoroxide, a semiconductor nitride, a semiconductor oxynitride, TEOS oxide,phosphosilicate glass (PSG), borophosphosilicate glass (BPSG),fluorinated silica glass (FSG), carbon doped silicon oxide, BlackDiamond®, Xerogel, Aerogel, amorphous fluorinated carbon, Parylene, BCB(bis-benzocyclobutenes), SiLK (Dow Chemical, Midland, Mich.), polyimide,other suitable materials, and/or combinations thereof.

For reference, a cross-sectional plane 2928 of the semiconductor device2900 is defined along the channel region 2906. FIGS. 30-34 are crosssectional views of slices taken along the cross sectional plane 2928.Referring to block 2804 of FIG. 28 and to FIG. 30, a layer ofphotoresist 3002 is applied to the top surface of the ILD layer 2926 andpatterned to form openings exposing regions of the ILD layer 2926 to beetched. This may be performed substantially as described in step 115 ofFIG. 1. Referring to block 2806 of FIG. 28 and to FIG. 31, a firstetching technique using a first etching chemistry is performed on theILD layer 2926 in order to etch portions of the ILD layer 2926 exposedby the photoresist 3002. The first etching process may be performedsubstantially as described in step 116 of FIG. 1 and may include anysuitable anisotropic or isotropic etching technique including dryetching, wet etching, reactive ion etching RIE, and/or combinationsthereof. In the illustrated embodiment, the first etching processutilizes an anisotropic etching technique configured to etch verticallythrough the ILD layer 2926 with minimal lateral etching. As can be seen,the first etching process exposes the gate electrode layer 2918 throughthe ILD layer 2926. This may include etching through the capping layer2920 if one is included in the gate stack 2908. Selectively etching theILD layer 2926 and the gate electrode layer 2918 may be achieved byadjusting the etching technique, the etchant, and/or other etchingparameters based on the materials to be etched. In the presentembodiment, a dry anisotropic plasma etch equipped withfluorine-containing gases, such as CF₄, CH₂F₂, or C₄F₆, is used.

Referring to block 2808 of FIG. 28 and to FIG. 32, a second etchingprocess is performed substantially as described in step 117 of FIG. 1 inorder to create a cavity in the gate electrode layer 2918. The secondetching process may utilize a non-directional, or isotropic, etchingtechnique configured to create the cavity so that it includes anundercut portion 3202 within the gate electrode layer 2918. In theillustrated embodiment, the undercut portion 3202 has a substantiallysymmetrical curvilinear surface 3204 and has its largest horizontalwidth (as measured parallel to the surface of the substrate 201) in aninterior portion of the gate electrode layer 2918. This creates anoverhang of the gate electrode material above the undercut portion 3202,which provides increased contact area between the gate electrode layer2918 and a subsequently formed contact. The increased surface area mayreduce resistivity at the contact interface and may also provide a moresecure electrical connection.

While an isotropic etching technique is shown, the second etchingprocess may include any suitable anisotropic or isotropic etchingtechnique including dry etching, wet etching, reactive ion etching RIE,and combinations thereof. The second etching process may use anysuitable etch chemistry or combination thereof, and in some embodiments,the etchants and other etching parameters are be tuned so that the gateelectrode layer 2918 of the gate stack 2908 is etched without etchingthe sidewall spacing layers 2922 and 2924, the gate dielectric layer2916, or the fin structures 2902. The second etching process may furtherinteract with the ILD layer 2926 to taper the profile of the contactopenings. The patterned photoresist 3002 may be removed before, during,or after the second etching process.

Referring to block 2810 of FIG. 28 and to FIG. 33, a glue layer oradhesion layer 3302 is deposited on the ILD layer 2926, the curvilinearsurface 3204 of the undercut portion 3202, and on the capping layer 2920if the gate stack 2908 so includes. The glue layer 3302 may include oneor more layers of conductive materials including metals, metal oxides,and/or metal nitrides, which may be deposited via CVD, PE CVD, ALD,PEALD, PVD, and/or other suitable deposition process substantially asdescribed in step 118 of FIG. 1. In the present embodiment, the gluelayer 3302 includes multiple deposited layers of Ti and TiN.

Referring to block 2812 of FIG. 28 and to FIG. 34 the trenches arefilled with a contact fill material 3402, which may be performedsubstantially as described in step 119 of FIG. 1. The deposited contactfill material 3402 may form contacts to the gate stack 2908 as well asto the source/drain (S/D) regions 2904 (the source/drain regions 2904and the respective contacts are not in the illustrated cross-sectionalplane). Because of the undercut portion 3202, the gate electrode layer2918 surrounds the contact fill material 3402, and at least some of thegate electrode layer 2918 is disposed on top of the contact fillmaterial 3402 (opposite the substrate). This increases the surface areabetween the gate electrode layer 2918 and the contact fill material 3402and may improve the electrical connection therebetween.

The contact fill material 3402 may include one or more layers of anysuitable conductive materials including metals, metal oxides, metalnitrides, and/or combinations thereof. In one such embodiment, thecontact fill material 3402 contains a barrier layer of that includes W,Ti, TiN, or Ru and a Cu-containing fill material disposed on the barrierlayer. In another embodiment, the contact fill material 3402 includestungsten. The contact fill material 3402 may be deposited by anysuitable technique including PVD (e.g., sputtering), CVD, PE CVD, ALD,PEALD, and/or combinations thereof. Deposition may be followed by a CMPprocess to remove contact fill material 3402 extending beyond the ILDlayer 2926.

An alternate contact alignment that may be formed by the method 2800 isdescribed with reference to FIGS. 35-39. This contact configuration maybe used in conjunction with the configuration of FIGS. 30-34, and bothmay be formed concurrently on the same substrate 201. Except as noted,the contact and the method of forming are substantially similar to thatdescribed with respect to FIGS. 28-34.

Referring to block 2802 of FIG. 28 and to FIG. 35, a semiconductordevice 2900, substantially similar to that of FIGS. 29-34 is received.The semiconductor device 2900 includes a gate stack 2908 to which acontact is to be formed. In contrast to the above examples, the gatecontact is shaped and aligned so that it extends beyond the gate stack2908.

Referring to block 2804 of FIG. 28 and to FIG. 35, a layer ofphotoresist 3002 is applied to the top surface of the ILD layer 2926 andpatterned to form openings exposing regions of the ILD layer 2926 to beetched. This may be performed substantially as described in step 115 ofFIG. 1. Referring to block 2806 of FIG. 28 and to FIG. 36, a firstetching technique substantially similar to that of step 116 of FIG. 1 isperformed to etch portions of the ILD layer 2926 exposed by thephotoresist 3002. In addition to etching the ILD layer 2926 and thecapping layer 2920 (if present), the first etching process removes aportion of one or more of the sidewall spacing layers 2922 and/or 2924.By so doing, the etching exposes additional surface area of the gateelectrode layer 2918 for contact formation.

Referring to block 2808 of FIG. 28 and to FIG. 37, a second etchingprocess is performed substantially as described in step 117 of FIG. 1 inorder to create a cavity in the gate electrode layer 2918. The secondetching process may utilize a non-directional, or isotropic, etchingtechnique configured to create the cavity so that it includes anundercut portion 3202 within the gate electrode layer 2918. In theillustrated embodiment, the undercut portion 3202 has a substantiallysymmetrical curvilinear surface 3204 within the gate electrode layer2918 and has its largest horizontal width (as measured parallel to thesurface of the substrate 201) within an interior portion of the gateelectrode layer 2918. This creates an overhang of the gate electrodematerial above the undercut portion 3202, which provides increasedcontact area between the gate electrode layer 2918 and a subsequentlyformed contact. The increased surface area may reduce resistivity at thecontact interface and may also provide a more secure electricalconnection.

In the illustrated embodiment, the curvilinear surface 3204 extendsthroughout the gate electrode layer 2918 until it reaches the sidewallspacing layer 2922. The second etching process may be configured toproduce minimal (if any) etching of the sidewall spacing layer 2922. Inthis way, the undercut portion 3202 does not extend into the sidewallspacing layer 2922. Accordingly, the second etching process may use anysuitable etch chemistry or combination thereof, and in some embodiments,the etchants and other etching parameters are be tuned so that the gateelectrode layer 2918 of the gate stack 2908 is etched without etchingthe sidewall spacing layers 2922 and 2924. While an isotropic etchingtechnique is shown, the second etching process may include any suitableanisotropic or isotropic etching technique including dry etching, wetetching, reactive ion etching RIE, and combinations thereof. The secondetching process may further interact with the ILD layer 2926 to taperthe profile of the contact openings. The patterned photoresist 3002 maybe removed before, during, or after the second etching process.

Referring to block 2810 of FIG. 28 and to FIG. 38, a glue layer oradhesion layer 3302 is deposited on the ILD layer 2926, the curvilinearsurface 3204 of the undercut portion 3202, and on the capping layer 2920if the gate stack 2908 so includes. The glue layer 3302 may include oneor more layers of conductive materials including metals, metal oxides,and/or metal nitrides, which may be deposited via ALD, CVD, PE CVDPEALD, PVD, and/or other suitable deposition process substantially asdescribed in step 118 of FIG. 1. In the present embodiment, the gluelayer 3302 includes multiple deposited layers of Ti and TiN.

Referring to block 2812 of FIG. 28 and to FIG. 39 the trenches arefilled with a contact fill material 3402, which may be performedsubstantially as described in step 119 of FIG. 1. The deposited contactfill material 3402 may form contacts to the gate stack 2908 as well asto the source/drain (S/D) regions 2904 (the source/drain structures 2904and the respective contacts are not in the illustrated cross-sectionalplane). Because of the undercut portion 3202, the gate electrode layer2918 surrounds the contact fill material 3402, and at least some of thegate electrode layer 2918 is disposed on top of the contact fillmaterial 3402 (opposite the substrate). This increases the surface areabetween the gate electrode layer 2918 and the contact fill material 3402and may improve the electrical connection therebetween.

The contact fill material 3402 may include one or more layers of anysuitable conductive materials including metals, metal oxides, metalnitrides, and/or combinations thereof. In one such embodiment, thecontact fill material 3402 contains a barrier layer of that includes W,Ti, TiN, or Ru and a Cu-containing fill material disposed on the barrierlayer. In another embodiment, the contact fill material 3402 includestungsten. The contact fill material 3402 may be deposited by anysuitable technique including PVD (e.g., sputtering), CVD, PE CVD, ALD,PEALD, and/or combinations thereof. Deposition may be followed by a CMPprocess to remove contact fill material 3402 extending beyond the ILDlayer 2926.

The present disclosure is not limited to applications in which thesemiconductor structure includes a FET (e.g. MOS transistor) and may beextended to other integrated circuit having a metal gate stack. Forexample, the semiconductor structures may include a dynamic randomaccess memory (DRAM) cell, an imaging sensor, a capacitor and/or othermicroelectronic devices (collectively referred to herein asmicroelectronic devices). In another embodiment, the semiconductorstructure includes FinFET transistors. Of course, aspects of the presentdisclosure are also applicable and/or readily adaptable to other type oftransistor, including single-gate transistors, double-gate transistorsand other multiple-gate transistors, and may be employed in manydifferent applications, including sensor cells, memory cells, logiccells, and others.

The foregoing has outlined features of several embodiments. Thoseskilled in the art should appreciate that they may readily use thepresent disclosure as a basis for designing or modifying other processesand structures for carrying out the same purposes and/or achieving thesame advantages of the embodiments introduced herein. Those skilled inthe art should also realize that such equivalent constructions do notdepart from the spirit and scope of the present disclosure, and thatthey may make various changes, substitutions and alterations hereinwithout departing from the spirit and scope of the present disclosure.

What is claimed is:
 1. A device comprising: a fin structure disposedover a substrate; a gate electrode layer disposed over the finstructure; and a contact extending into the gate electrode layer suchthat a portion of the gate electrode layer is disposed over the contact.2. The device of claim 1, further comprising a dielectric layer disposedover the gate electrode layer, and wherein the contact extends throughthe dielectric layer.
 3. The device of claim 1, further comprisinganother fin structure disposed over the substrate, and wherein the gateelectrode layer is disposed over the another fin structure.
 4. Thedevice of claim 3, further comprising a shallow trench isolationstructure extending from the fin structure to the another fin structure.5. The device of claim 1, wherein the substrate is formed of asemiconductor material and the fin structure is formed of thesemiconductor material.
 6. The device of claim 1, further comprising acapping layer disposed over the gate electrode layer, and wherein thecontact extends through the capping layer.
 7. The device of claim 6,wherein the capping layer includes a conductive material and the cappinglayer physically contacts the gate electrode layer.
 8. A devicecomprising: a gate stack disposed over a semiconductor substrate, thegate stack including a gate electrode; a sidewall spacer disposed alonga sidewall of the gate stack; and a contact disposed over the sidewallspacer and extending into the gate electrode such that the gateelectrode is disposed over a portion of the contact.
 9. The device ofclaim 8, wherein the sidewall spacer has a top surface facing away fromthe semiconductor substrate and the contact is disposed directly overthe top surface of the sidewall spacer.
 10. The device of claim 8,further comprising another sidewall spacer disposed along anothersidewall of the gate stack, the another sidewall spacer of the gatestack opposing the sidewall of the gate stack, and wherein the sidewallspacer has a first height and the another sidewall spacer has a secondheight that is different than the first height.
 11. The device of claim10, wherein the gate stack includes a capping layer disposed over thegate electrode and extends from the another sidewall spacer towards thesidewall spacer without interfacing with the sidewall spacer.
 12. Thedevice of claim 11, further comprising: a dielectric layer disposed overthe gate stack, the dielectric layer having a sidewall; and an adhesivematerial disposed along the sidewall of the dielectric layer and alongan edge of the gate electrode such that the contact is separated fromthe dielectric layer and the gate electrode by the adhesive material.13. The device of claim 8, further comprising a dielectric layerdisposed over the gate stack, the dielectric layer having a surfacefacing away from the semiconductor substrate, and wherein the contactextends through the dielectric layer and is disposed directly over thesurface of the dielectric layer.
 14. The device of claim 8, wherein thegate electrode is disposed under the portion of the contact.
 15. Adevice comprising: a gate stack disposed over a semiconductor substrate,the gate stack including a first metal layer and a second metal layer;and a contact disposed within the first metal layer and extending to thesecond metal layer, wherein a portion of the first metal layer isdisposed over a portion the contact.
 16. The device of claim 15, furthercomprising a gate dielectric layer, and wherein the second metal layerhas a first edge and opposing second edge, the first edge interfacingwith the first metal layer and the second edge interfacing with the gatedielectric layer.
 17. The device of claim 16, further comprising asidewall spacer disposed on the gate stack, the sidewall spacer having athird edge that faces the second edge and interfaces with the gatedielectric layer.
 18. The device of claim 15, wherein the first metallayer has a first top surface facing away from the semiconductorsubstrate and the second metal layer has a second top surface facingaway from the semiconductor substrate such that the first and second topsurfaces are substantially coplanar.
 19. The device of claim 15, whereinthe first metal layer has a first top surface facing away from thesemiconductor substrate and the second metal layer has a second topsurface facing away from the semiconductor substrate, and wherein thegate stack includes a conductive layer disposed over a physicallycontacting the first top surface of the first metal layer and the secondtop surface of the second metal layer.
 20. The device of claim 19,wherein the contact extends through the conductive layer.